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作者:

Zhang, Zhuo (Zhang, Zhuo.) | Yu, Yueqing (Yu, Yueqing.) (学者:余跃庆) | Zhang, Xuping (Zhang, Xuping.)

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EI Scopus

摘要:

This work presents comprehensive experimental studies on performance comparisons between V- and Z-shaped electrothermal microactuators. The V- and Z-shaped electrothermal microactuators are fabricated by depositing a copper layer on each side of SU-8 photoresist. The steady-state output displacement and dynamic responses of V- and Z-shaped actuators are compared based on experimental testing. In addition, a unique actuator with mixed V- and Z-shaped beams is designed and tested to further compare the force output capabilities of the V- and Z-shaped beams. Experimental data is acquired based on image processing, and a parallel spring model is proposed to analyze the experimental results. Comprehensive discussions are given to provide insights and guidance on the selection and design of the V- and Z-shaped electrothermal micoactuators. © 2018 IEEE.

关键词:

Electric heating Image processing Microactuators Photoresists

作者机构:

  • [ 1 ] [Zhang, Zhuo]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
  • [ 2 ] [Yu, Yueqing]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
  • [ 3 ] [Zhang, Xuping]Department of Engineering, Aarhus University, Aarhus, Denmark

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年份: 2018

页码: 521-526

语种: 英文

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SCOPUS被引频次: 1

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