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The effect of different base structural parameters on SiGe Heterojunction Phototransistor (HPT) performance is analyzed in this paper. It proposes a reference for designing SiGe HPT with both high responsivity and high characteristic frequency. Responsivity of 5.58 A/W and characteristic frequency of 21.29 GHz for 850 nm light are achieved when the thickness of base layer is 70nm with the doping concentration of 1.0×1019 cm-3. © 2018 IEEE.
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