Fiber fabry-pero micro pressure sensor - 文章详情页

作者：

Yang, Xiaojing (Yang, Xiaojing.) | Wang, Yiting (Wang, Yiting.)

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EI Scopus

摘要：

A　new　fiber　fabry-perot　pressure　sensor　is　designed.　It　is　made　by　photolithography,　silicon　wafer　etching,　anode　bonding,　microelectromechanical　system　technology　and　so　on.　It　is　suitable　for　the　pressure　measurement　of　micro-pressure　environment　under　harsh　environment　and　small　space.　The　structure　of　the　transmitter　and　the　way　to　make　it　are　described　in　detail.　The　design　smartly　uses　the　Fiber　optic　flange,　the　optical　fiber　end　face　is　parallel　to　the　sensitive　film,　thus　a　high-quality　Fabry-Pero-cavity　is　formed.　The　structure　also　contributes　to　the　stability　of　the　initial　cavity,　the　sensor　error　is　reduced.　The　experimental　demodulation　system　is　established,　the　pressure,　temperature　and　other　characteristics　are　tested　in　detail.　The　experiment　result　shows　that　within　the　pressure　range　of　1~1.1MPa,　the　sensor　has　a　good　linearity,　high　repeatability　and　a　sensitivity　of　61.6　μm/MPa.　©　The　Authors,　published　by　EDP　Sciences,　2017.

关键词：

Electromechanical devices Etching Fabry-Perot interferometers Fiber optics Fiber optic sensors MEMS Microsensors Optical fibers Pressure sensors Sensors Silicon wafers Wafer bonding

作者机构：

[ 1 ] [Yang, Xiaojing]College of Computer and information engineering, Anyang Normal University, Anyang; 455000, China
[ 2 ] [Yang, Xiaojing]International WIC Institute, Beijing University of Technology, Beijing; 100124, China
[ 3 ] [Wang, Yiting]College of Computer and information engineering, Anyang Normal University, Anyang; 455000, China
[ 4 ] [Wang, Yiting]International WIC Institute, Beijing University of Technology, Beijing; 100124, China

通讯作者信息：

[yang, xiaojing]international wic institute, beijing university of technology, beijing; 100124, china;;[yang, xiaojing]college of computer and information engineering, anyang normal university, anyang; 455000, china

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