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作者:

Yan, Ruixuan (Yan, Ruixuan.) | Wei, Xianglei (Wei, Xianglei.) | He, Chunhua (He, Chunhua.) | Zhao, Qiancheng (Zhao, Qiancheng.) | Yang, Zhenchuan (Yang, Zhenchuan.) | Yan, Guizhen (Yan, Guizhen.)

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EI Scopus

摘要:

In this paper, the influence of MEMS gyroscope's tuning voltage on its resonant frequency is investigated analytically and experimentally. The theoretical deduction shows that, with the increase of the tuning voltage, the frequency of drive mode is constant due to area-changing electrostatic driving scheme, while the square of the frequency of the sense mode is linearly dependent on the square of the tuning voltage due to the gap-changing electrostatic sensing scheme. Experimental results demonstrate good agreement with the theoretical analysis. Furthermore, the frequency of sense mode is affected by the structure and fabrication process of MEMS gyroscopes. © 2015 IEEE.

关键词:

Tuning Electrostatics Natural frequencies Gyroscopes

作者机构:

  • [ 1 ] [Yan, Ruixuan]College of Electronic Information and Control Engineering, Beijing University of Technology. Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 2 ] [Wei, Xianglei]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 3 ] [He, Chunhua]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 4 ] [Zhao, Qiancheng]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 5 ] [Yang, Zhenchuan]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 6 ] [Yan, Guizhen]National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing; 100871, China

通讯作者信息:

  • [yang, zhenchuan]national key laboratory of science and technology on micro/nano fabrication, institute of microelectronics, peking university, beijing; 100871, china

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年份: 2015

页码: 435-437

语种: 英文

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SCOPUS被引频次: 1

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