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摘要:
Optical element of micro grating is usually made using expensive ultraviolet laser or ultrafast laser. In order to reduce the cost a 532nm green laser with long pulse width 1ms was used to etch K9 glass of 5mm thickness directly. This laser is inexpensive and easily maintained comparing with femtosecond laser and excimer laser. It was successfully applied for the fabrication of single trench and two-dimensional periodic micro-structure on K9 glass. We achieved the smooth single trench with the width of 22 pm and depth of 2.2 μm with this laser. The roughness of the trench bottom is below 40nm according to the measurement of 3D profiler. The crisscross 2D periodic micro-structured was etched with the laser fluence 3.5 J/cm2. The depth is about 1.1 μm and the width at the surface of the glass is approximately 15μm. There is no micro crack found on the surface of glass with optical microscope. In addition the diffraction patterns were observed, which proved the optics element works well. Copyright © 2013 MS&T'13®.
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年份: 2014
卷: 4
页码: 2450-2457
语种: 英文