• 综合
  • 标题
  • 关键词
  • 摘要
  • 学者
  • 期刊-刊名
  • 期刊-ISSN
  • 会议名称
搜索

作者:

Huang, Chao (Huang, Chao.) | Chen, Jimin (Chen, Jimin.) (学者:陈继民) | Yan, Hengfeng (Yan, Hengfeng.)

收录:

EI Scopus

摘要:

Optical element of micro grating is usually made using expensive ultraviolet laser or ultrafast laser. In order to reduce the cost a 532nm green laser with long pulse width 1ms was used to etch K9 glass of 5mm thickness directly. This laser is inexpensive and easily maintained comparing with femtosecond laser and excimer laser. It was successfully applied for the fabrication of single trench and two-dimensional periodic micro-structure on K9 glass. We achieved the smooth single trench with the width of 22 pm and depth of 2.2 μm with this laser. The roughness of the trench bottom is below 40nm according to the measurement of 3D profiler. The crisscross 2D periodic micro-structured was etched with the laser fluence 3.5 J/cm2. The depth is about 1.1 μm and the width at the surface of the glass is approximately 15μm. There is no micro crack found on the surface of glass with optical microscope. In addition the diffraction patterns were observed, which proved the optics element works well. Copyright © 2013 MS&T'13®.

关键词:

Ultrafast lasers Ultraviolet lasers Microstructure Excimer lasers Lasers Glass Fabrication Diffraction gratings

作者机构:

  • [ 1 ] [Huang, Chao]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Chen, Jimin]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Yan, Hengfeng]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

通讯作者信息:

电子邮件地址:

查看成果更多字段

相关关键词:

相关文章:

来源 :

年份: 2014

卷: 4

页码: 2450-2457

语种: 英文

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次:

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 0

在线人数/总访问数:1394/3893594
地址:北京工业大学图书馆(北京市朝阳区平乐园100号 邮编:100124) 联系我们:010-67392185
版权所有:北京工业大学图书馆 站点建设与维护:北京爱琴海乐之技术有限公司