For　smooth　operation　of　SCARA　robot　for　wafer　transition,　a　new　method　using　magenetorhelogical　damper　for　vibration　suppression　is　proposed.　Vibration　often　occurs　when　the　acceleration　decrease　or　increase　abruptly.　Especially　in　the　end　of　an　operation　period,　the　residual　vibration　decreases　the　safety　of　wafer　operation　and　extends　settling　time.　Firstly,　Vibration　sources　are　analyzed.　And　dynamics　model　of　robot　joint　considering　elasticity　is　established.　Magenetorhelogical　damper　is　introduced　into　joint　structure　to　realize　vibration　suppression　by　physical　mean.　It　could　provide　a　reliable　suppression　effectiveness.　Control　structure　of　joint　with　elasticity　and　MR　damper　is　discussed.　A　PD　controller　is　applied　into　joint　motion　control　to　a　desired　movement.　Frequency　characteristics　of　the　joint　with　MR　damper　are　analyzed.　Finally,　a　simulation　is　implemented　to　verify　the　effectiveness　of　the　proposed　method.　©　2014　IEEE.