This　paper　established　the　finite　element　model　of　a　hydrostatic　guideway.　Based　on　the　thermal　characteristic　simulation　analysis,　the　temperature　field　and　thermal　deformation　of　the　guideway　were　obtained.　The　analysis　results　show　that　the　oil　film　temperature　increment　will　cause　thermal　deformation　of　the　guideway　and　processing　errors.　The　errors　will　influence　the　machining　accuracy　of　machine　tools.　The　analysis　results　provide　certain　theory　basis　for　the　research　on　the　above　influence.　And　then　the　results　also　give　certain　reference　for　the　research　on　the　thermal　error　compensation　of　machine　tools.　©　(2013)　Trans　Tech　Publications,　Switzerland.