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作者:

Lu, Yuan (Lu, Yuan.) | Yin, Wen (Yin, Wen.) | Zhang, Bo (Zhang, Bo.) | Yu, Daquan (Yu, Daquan.) | Wan, Lixi (Wan, Lixi.) | Shangguan, Dongkai (Shangguan, Dongkai.) | Xia, Guofeng (Xia, Guofeng.) | Qin, Fei (Qin, Fei.) (学者:秦飞) | Ru, Mao (Ru, Mao.) | Xiao, Fei (Xiao, Fei.)

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EI Scopus

摘要:

Just in few years, three-dimensional (3D) packaging technologies have attracted much more attention. With emergence of through-silicon via (TSV) technology, silicon-based device integrations, the TSV's, have become the main stream of 3D packaging technologies. TSV's can be further classified as 2.5D and 3D TSV's. For 2.5D TSV package assembly, since multiple components involved, there are normally two assembly process approaches, i.e., from 'Top-to-Bottom' (TOB), or from 'Bottom-to-Top (BOT). Each approach has its own pros and cons. From stress minimization aspect, TOB is more desirable. But from packaging assembly easiness viewpoint, BOT is more practical and thus has been mainly utilized. To overcome these dilemmas occurred in 2.5D TSV package assembly, a new assembly process approach, called new TOB (n-TOB), has been developed. Instead of bonding the chip onto the interposer, the n-TOB starts out with precisely bonding the interposer onto the chip with using a specially-designed eccentric-axis pickup tip which also effectively protects the flip chip C4 bumps on the interposer backside during bonding. Finite-element (FE) simulation and reliability tests were employed to assess the effectiveness and impact of this new assembly approach on 2.5D TSV packages. The assessment results show that n-TOB is feasible with at least the same performance in both package assembly and reliability. © 2013 IEEE.

关键词:

Assembly Chip scale packages Flip chip devices Network components Three dimensional integrated circuits

作者机构:

  • [ 1 ] [Lu, Yuan]National Center for Advanced Packaging, Wuxi, Jiangsu, 214135, China
  • [ 2 ] [Lu, Yuan]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 3 ] [Yin, Wen]National Center for Advanced Packaging, Wuxi, Jiangsu, 214135, China
  • [ 4 ] [Yin, Wen]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 5 ] [Zhang, Bo]National Center for Advanced Packaging, Wuxi, Jiangsu, 214135, China
  • [ 6 ] [Zhang, Bo]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 7 ] [Yu, Daquan]National Center for Advanced Packaging, Wuxi, Jiangsu, 214135, China
  • [ 8 ] [Yu, Daquan]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 9 ] [Wan, Lixi]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 10 ] [Shangguan, Dongkai]National Center for Advanced Packaging, Wuxi, Jiangsu, 214135, China
  • [ 11 ] [Shangguan, Dongkai]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 12 ] [Xia, Guofeng]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, 100124, China
  • [ 13 ] [Qin, Fei]Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
  • [ 14 ] [Ru, Mao]Department of Material Science, Fudan University, Shanghai, 200433, China
  • [ 15 ] [Xiao, Fei]Department of Material Science, Fudan University, Shanghai, 200433, China

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ISSN: 0569-5503

年份: 2013

页码: 1965-1969

语种: 英文

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WoS核心集被引频次: 0

SCOPUS被引频次: 9

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