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作者:

Zhou, Weiping (Zhou, Weiping.) | Liu, Furong (Liu, Furong.) (学者:刘富荣) | He, Chao (He, Chao.) | Chen, Jimin (Chen, Jimin.) (学者:陈继民)

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摘要:

In this paper, a novel method of fabricate lead-free piezoelectric sodium potassium niobate [(K,Na)NbO3,KNN] thin films was proposed. The KNN thin films were directly sintered on glass substrate at room temperature by pulsed laser. And all of the steps do not need vacuum conditions. Compared with conventional preparation techniques, such as RF-magnetron sputtering and metal-organic chemical vapor deposition (MOCVD), this method is more simpler and faster. The surface morphology of KNN thin film was observed with scanning electron microscopy (SEM), phase composition and structure were characterized by X-ray diffraction (XRD). These results indicate that the KNN thin film was succeeded fabricated by the method. © 2012 IEEE.

关键词:

Fabrication Glass Laser heating Magnetron sputtering Metallorganic chemical vapor deposition Morphology Niobium compounds Optoelectronic devices Organic chemicals Organometallics Photonics Pulsed lasers Scanning electron microscopy Sintering Sodium compounds Substrates Surface morphology Thin films

作者机构:

  • [ 1 ] [Zhou, Weiping]Institute of Laser Engineering, Beijing University of Technology, Beijing, China
  • [ 2 ] [Liu, Furong]Institute of Laser Engineering, Beijing University of Technology, Beijing, China
  • [ 3 ] [He, Chao]Institute of Laser Engineering, Beijing University of Technology, Beijing, China
  • [ 4 ] [Chen, Jimin]Institute of Laser Engineering, Beijing University of Technology, Beijing, China

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年份: 2012

语种: 英文

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