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作者:

Zhao, Shuai (Zhao, Shuai.) | Yu, Daquan (Yu, Daquan.) | Zou, Yichao (Zou, Yichao.) | Yang, Chaodong (Yang, Chaodong.) | Yang, Xiaobing (Yang, Xiaobing.) | Xiao, Zhiyi (Xiao, Zhiyi.) | Chen, Pei (Chen, Pei.) | Qin, Fei (Qin, Fei.) (学者:秦飞)

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EI Scopus SCIE

摘要:

Integration of microfluidics with integrated circuit chip is a promising method to achieve lab-on-a-chip for its high-level miniaturization and portability in application. In this paper, a novel approach for integration of complementary metal- oxide-semiconductor image sensor and microwell array using the 3-D wafer-level chip scale package (3-D WLCSP) technology for biodetector is presented. The key process including silicon microwell array fabricating, wafer-level bonding, backside grinding, through-silicon via etching, redistribution layer, and hall grid array formation are developed. A high-density serpentine electrical circuit is integrated on the backside of the package to work as a temperature controller. After the fabrication process optimization, a yield rate of 94.6% is obtained. The reliability of the packages is characterized by thermal cycling and highly accelerated stress test temperature storage tests, and the results show a good package level reliability. The proposed 3-D WLCSP provides a low-cost and reliable solution for the fluidic biodetector integration.

关键词:

microfluidics 3-D wafer-level chip scale package (3-D WLCSP) microwell lab-on-a-chip (LoC) through-silicon via (TSV) complementary metal-oxide-semiconductor image sensor (CIS) biodetector

作者机构:

  • [ 1 ] [Zhao, Shuai]Beijing Univ Technol, Inst Elect Packaging Technol & Reliabil, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Chen, Pei]Beijing Univ Technol, Inst Elect Packaging Technol & Reliabil, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Qin, Fei]Beijing Univ Technol, Inst Elect Packaging Technol & Reliabil, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Yu, Daquan]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China
  • [ 5 ] [Zou, Yichao]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China
  • [ 6 ] [Yang, Chaodong]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China
  • [ 7 ] [Yang, Xiaobing]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China
  • [ 8 ] [Xiao, Zhiyi]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China

通讯作者信息:

  • 秦飞

    [Qin, Fei]Beijing Univ Technol, Inst Elect Packaging Technol & Reliabil, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China;;[Yu, Daquan]Huatian Technol Kunshan Elect Co Ltd, Kunshan 215300, Peoples R China

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来源 :

IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY

ISSN: 2156-3950

年份: 2019

期: 4

卷: 9

页码: 624-632

2 . 2 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:136

JCR分区:3

被引次数:

WoS核心集被引频次: 5

SCOPUS被引频次: 6

ESI高被引论文在榜: 0 展开所有

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