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摘要:
Integration of microfluidics with integrated circuit chip is a promising method to achieve lab-on-a-chip for its high-level miniaturization and portability in application. In this paper, a novel approach for integration of complementary metal- oxide-semiconductor image sensor and microwell array using the 3-D wafer-level chip scale package (3-D WLCSP) technology for biodetector is presented. The key process including silicon microwell array fabricating, wafer-level bonding, backside grinding, through-silicon via etching, redistribution layer, and hall grid array formation are developed. A high-density serpentine electrical circuit is integrated on the backside of the package to work as a temperature controller. After the fabrication process optimization, a yield rate of 94.6% is obtained. The reliability of the packages is characterized by thermal cycling and highly accelerated stress test temperature storage tests, and the results show a good package level reliability. The proposed 3-D WLCSP provides a low-cost and reliable solution for the fluidic biodetector integration.
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来源 :
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
ISSN: 2156-3950
年份: 2019
期: 4
卷: 9
页码: 624-632
2 . 2 0 0
JCR@2022
ESI学科: ENGINEERING;
ESI高被引阀值:136
JCR分区:3
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