A closed-loop switched-capacitor readout circuit for Micromachined capacitive accelerometer - 文章详情页

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EI Scopus

摘要：

This　paper　presents　an　interface　readout　circuit　for　Micromachined　capacitive　accelerometer.　An　analog　closed-loop　switched-capacitor　(SC)　interface　circuit　is　proposed　to　achieve　high　linearity　and　large　dynamic　range　of　the　sensor.　Correlated　double　sampling　(CDS)　technique　is　used　in　SC　circuits　to　minimize　offset　and　1/f　noise　of　the　amplifier.　The　stability　of　the　close-loop　system　is　improved　by　adding　a　proportional-derivative　(PD)　controller.　A　2nd-order　single-bit　Σ-Δ　modulator　is　used　to　digitize　the　output　of　the　SC　loop.　The　post-simulation　results　indicate　that　the　sensitivity　of　the　system　is　900mV/g　and　the　2.9μV/√　Hz　noise　floor.　The　non-linearity　is　less　than　0.7%　with　full　scale　acceleration　of　±1.8　g.　The　nominal　supply　voltage　is　5V　and　the　signal　bandwidth　ranges　from　DC　up　to　200Hz.　The　active　area　of　the　SC　readout　circuit　is　2mm　2　in　a　0.35μm　CMOS　process.　©　2012　IEEE.

关键词：

Accelerometers Modulators Readout systems Timing circuits

作者机构：

[ 1 ] [Chen, Rui]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Lu, You]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Lang, Wei]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Wan, Peiyuan]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Zhang, Chi]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 6 ] [Lin, Ping]Beijing Embedded System Key Lab, Beijing University of Technology, Beijing 100124, China
[ 7 ] [Su, Weiguo]Institute of Microelectronics of Peking University, Peking University, Beijing 100871, China
[ 8 ] [Zhang, Wei]Institute of Microelectronics of Peking University, Peking University, Beijing 100871, China

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crcherry@emails.bjut.edu.cn

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