The　high-tech　industry　has　evolved　to　reflect　the　importance　of　scientific　level　of　a　country　and　lead　the　development　of　new　industries　and　economic　growth,　technical　efficiency　relates　to　an　industry　or　business　viability　and　development　opportunities,　is　an　important　way　able　to　effectively　improve　the　area　or　industrial　economy.　By　researching　and　studying　the　literature　of　the　efficiency　and　technical　efficiency　of　high-tech　industry　at　home　and　abroad,　this　paper　reviewed　the　current　situation　of　the　technical　efficiency　of　high-tech　industry,　and　then　it　put　forward　the　characteristic　and　shortage　of　existing　research.　Finally,　the　future　research　on　the　technical　efficiency　of　high-tech　industry　was　discussed.　©　2011　IEEE.