Sulfuric acid corrosion of ito surface for improvement of the optical properties - 文章详情页

作者：

Xu, Xinwei (Xu, Xinwei.) | Cui, Bifeng (Cui, Bifeng.) | Guo, Weiling (Guo, Weiling.) | Zhu, Yanxu (Zhu, Yanxu.) | Cui, Desheng (Cui, Desheng.)

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摘要：

After　the　surface　treatment　with　concentrate　sulfuric　acid,　the　sheet　resistance　of　ITO　layer　is　unchanged,　while　the　surface　roughness　increased.　When　the　70-100nm　ITO　layer　is　eroded　by　the　concentrate　sulfuric　acid　for　480　seconds,　its　reflectivity　decreased　and　the　transmittance　significantly　increased.　It　can　improve　the　optical　properties　of　the　LED　devices.　©　2011　IEEE.

关键词：

Corrosion Optical properties Remote sensing Sulfuric acid Surface roughness Surface treatment

作者机构：

[ 1 ] [Xu, Xinwei]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing, China
[ 2 ] [Cui, Bifeng]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing, China
[ 3 ] [Guo, Weiling]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing, China
[ 4 ] [Zhu, Yanxu]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing, China
[ 5 ] [Cui, Desheng]KEY Laboratory of Opto-electronics Technology, Beijing University of Technology, Beijing, China

通讯作者信息：

电子邮件地址：

xuxinwei@emails.bjut.edu.cn

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