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Author:

Feng, Jingjing (Feng, Jingjing.) | Liu, Cheng (Liu, Cheng.) | Zhang, Wei (Zhang, Wei.) | Han, Jianxin (Han, Jianxin.) | Hao, Shuying (Hao, Shuying.)

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EI Scopus SCIE PubMed

Abstract:

A class of bipolar electrostatically actuated micro-resonators is presented in this paper. Two parametric equations are proposed for changing the microbeam shape of the upper and lower sections. The mechanical properties of a micro-resonator can be enhanced by optimizing the two section parameters. The electrostatic force nonlinearity, neutral surface tension, and neutral surface bending are considered in the model. First, the theoretical results are verified with finite element results from COMSOL Multiphysics simulations. The influence of section variation on the electrostatic force, pull-in behaviors and safe working area of the micro-resonator are studied. Moreover, the impact of residual stress on pull-in voltage is discussed. The multi-scale method (MMS) is used to further study the vibration of the microbeam near equilibrium, and the relationship between the two section parameters of the microbeam under linear vibration was determined. The vibration amplitude and resonance frequency are investigated when the two section parameters satisfy the linear vibration. In order to research dynamic analysis under the case of large amplitude. The Simulink dynamics simulation was used to study the influence of section variation on the response frequency. It is found that electrostatic softening increases as the vibration amplitude increases. If the nonlinearity initially shows hardening behavior, the frequency response will shift from hardening to softening as the amplitude increases. The position of softening-hardening transition point decreases with the increase of residual stress. The relationship between DC voltage, section parameters, and softening-hardening transition points is presented. The accuracy of the results is verified using theoretical, numerical, and finite element methods.

Keyword:

softening-hardening transition points finite element methods parametric equation Simulink dynamics simulation

Author Community:

  • [ 1 ] [Feng, Jingjing]Tianjin Univ Technol, Tianjin Key Lab Design & Intelligent Control Adv, Sch Mech Engn, Tianjin 300384, Peoples R China
  • [ 2 ] [Liu, Cheng]Tianjin Univ Technol, Tianjin Key Lab Design & Intelligent Control Adv, Sch Mech Engn, Tianjin 300384, Peoples R China
  • [ 3 ] [Hao, Shuying]Tianjin Univ Technol, Tianjin Key Lab Design & Intelligent Control Adv, Sch Mech Engn, Tianjin 300384, Peoples R China
  • [ 4 ] [Zhang, Wei]Beijing Univ Technol, Beijing Key Lab Nonlinear Vibrat & Strength Mech, Coll Mech Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Han, Jianxin]Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Machi, Sch Mech Engn, Tianjin 300222, Peoples R China
  • [ 6 ] [Feng, Jingjing]Tianjin Univ Technol, Natl Demonstrat Ctr Expt Mech & Elect Engn Educ, Tianjin 300384, Peoples R China
  • [ 7 ] [Liu, Cheng]Tianjin Univ Technol, Natl Demonstrat Ctr Expt Mech & Elect Engn Educ, Tianjin 300384, Peoples R China
  • [ 8 ] [Hao, Shuying]Tianjin Univ Technol, Natl Demonstrat Ctr Expt Mech & Elect Engn Educ, Tianjin 300384, Peoples R China

Reprint Author's Address:

  • [Feng, Jingjing]Tianjin Univ Technol, Tianjin Key Lab Design & Intelligent Control Adv, Sch Mech Engn, Tianjin 300384, Peoples R China;;[Liu, Cheng]Tianjin Univ Technol, Tianjin Key Lab Design & Intelligent Control Adv, Sch Mech Engn, Tianjin 300384, Peoples R China;;[Zhang, Wei]Beijing Univ Technol, Beijing Key Lab Nonlinear Vibrat & Strength Mech, Coll Mech Engn, Beijing 100124, Peoples R China;;[Feng, Jingjing]Tianjin Univ Technol, Natl Demonstrat Ctr Expt Mech & Elect Engn Educ, Tianjin 300384, Peoples R China;;[Liu, Cheng]Tianjin Univ Technol, Natl Demonstrat Ctr Expt Mech & Elect Engn Educ, Tianjin 300384, Peoples R China

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Source :

SENSORS

ISSN: 1424-8220

Year: 2019

Issue: 6

Volume: 19

3 . 9 0 0

JCR@2022

ESI Discipline: CHEMISTRY;

ESI HC Threshold:166

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 15

SCOPUS Cited Count: 15

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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