Profile measurement for micro-optical component using lensless fourier digital holography - 文章详情页

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EI Scopus

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Digital　holography　imaging　method　is　presented　for　three-dimensional　profile　detection　of　the　micro-optical　component.　Firstly,　digital　holography　configuration　based　on　off-axis　lensless　Fourier　transform　(LFT)　is　designed,　and　then　the　profile　of　the　hexagonal　micro-lens　array　is　detected　by　Fresnel　reconstruction　and　phase-unwrapping　algorithms.　Meanwhile,　the　white　light　interferometer　is　applied　to　measure　the　profile　parameters　of　the　micro-lens　array.　The　results　indicate　that　the　profile　parameters　obtained　above　are　in　good　agreement,　which　demonstrate　that　the　LFT　based　digital　holography　provides　an　effective　method　for　3D　profile　detection　of　the　micro-optical　component.

关键词：

Holography Microlenses

作者机构：

[ 1 ] [Wang, Yunxin]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Wang, Dayong]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Li, Yan]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Zhao, Jie]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Zhang, Yizhuo]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 6 ] [Wan, Yuhong]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 7 ] [Jiang, Zhuqing]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China

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