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作者:

Liu, Ying (Liu, Ying.) | Jiang, Yijian (Jiang, Yijian.) (学者:蒋毅坚)

收录:

EI Scopus

摘要:

This paper describes using KrF excimer laser for fabricating conducting pattern on Polyvinylidene fluoride (PVDF) substrates. Any graph is machined by direct laser writing technique. Furthermore, the defect structure is prepared on this patterned surface where laser etching is carried out. Mask patterning is used to select the conducting area when the patterned sample is irradiated by KrF excimer laser. As a result, the conducting layer is controlled automatically and generated rapidly on the surface. Conductivity on the order of 10-1 Ω-1cm-1, increasing up to 12 orders of magnitude, is obtained under the laser energy density form 44mJ /cm2 to 112mJ /cm2. The surface morphology and chemical constitution of modified surfaces investigated by scanning electron microscope (SEM), and Fourier-Transform-Raman spectroscopy (FT-Raman).Based on the results, the possible mechanisms of conducting layer formation are discussed.

关键词:

Etching Excimer lasers Fabrication Fluorine compounds Morphology Scanning electron microscopy Substrates Surface morphology

作者机构:

  • [ 1 ] [Liu, Ying]Institute of Laser Engineering, Beijing University of Technology, Ping le Yuan 100, Chaoyang District, Beijing, 100124, China
  • [ 2 ] [Jiang, Yijian]Institute of Laser Engineering, Beijing University of Technology, Ping le Yuan 100, Chaoyang District, Beijing, 100124, China

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年份: 2009

卷: 102

页码: 1099-1103

语种: 英文

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