收录：
摘要：
In this paper, we introduce a compact measuring system, to analyze microstructure force property. The system is specially designed in which a mechanical test machine, a PCB board based on an USB connection for device driving and data collection, and processing software were contained. This system can be used for measuring deformation characteristics of MEMS structures by bending method. To confirm the feasibility of the system, an experiment was performed on a micro pillar. © 2008 IEEE.
关键词：
通讯作者信息：
电子邮件地址：
来源 ：
年份： 2008
页码： 5-8
语种： 英文
