A compact microstructure mechanical property measuring system - 文章详情页

作者：

Chen, Tao (Chen, Tao.) (学者：陈涛) | Zhang, Lin (Zhang, Lin.) | Wu, Jian (Wu, Jian.) | Liu, Shibing (Liu, Shibing.) (学者：刘世炳) | Zuo, Tiechuan (Zuo, Tiechuan.)

收录：

EI Scopus

摘要：

In　this　paper,　we　introduce　a　compact　measuring　system,　to　analyze　microstructure　force　property.　The　system　is　specially　designed　in　which　a　mechanical　test　machine,　a　PCB　board　based　on　an　USB　connection　for　device　driving　and　data　collection,　and　processing　software　were　contained.　This　system　can　be　used　for　measuring　deformation　characteristics　of　MEMS　structures　by　bending　method.　To　confirm　the　feasibility　of　the　system,　an　experiment　was　performed　on　a　micro　pillar.　©　2008　IEEE.

关键词：

Software testing Microstructure Mechanical properties

作者机构：

[ 1 ] [Chen, Tao]Institute of Laser Engineering, Beijing University of Technology, China
[ 2 ] [Zhang, Lin]Institute of Laser Engineering, Beijing University of Technology, China
[ 3 ] [Wu, Jian]Institute of Laser Engineering, Beijing University of Technology, China
[ 4 ] [Liu, Shibing]Institute of Laser Engineering, Beijing University of Technology, China
[ 5 ] [Zuo, Tiechuan]Institute of Laser Engineering, Beijing University of Technology, China

通讯作者信息：

电子邮件地址：

chentao@bjut.edu.cn

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