Most　of　Micro-fabrication　technologies　are　one　complex　process.　The　final　machining　precision　and　forming　quality　of　the　3D　microstructures　are　decided　not　only　by　the　movement　and　control　performance　of　the　machining　system,　but　also　by　various　outside　condition　factors.　Through　real-time　monitoring　the　machining　process　and　eliminating　the　technical　error,　the　fabricating　successful　rate　and　completing　rate　will　be　improved.　In　this　paper,　one　process　monitoring　system　based　on　Machine　Vision　is　presented　to　be　used　in　one　Femtosecond　laser　micro-fabrication　system.　According　to　the　technic　characteristic,　point　to　point　and　layer　to　layer　molding,　two　monitoring　strategies　are　put　forwarded　respectively　to　different　machining　process.　Single　cell　point　image　is　used　to　judge　the　laser　solidified　result　through　the　Support　Vector　Machine　and　the　machining　precision　can　be　promised.　The　layer　image　is　used　to　be　compared　with　the　design　locus　and　the　forming　quality　of　the　3D　microstructure　can　be　gained.　Whole　vision　monitoring　system　is　built　with　the　Virtual　Instrument　development　condition,　Labview.　The　image　obtaining　and　process　are　both　realized　by　software,　this　decreases　the　system　developing　cost.　The　strategy　of　the　vision　monitoring　system　is　also　applicable　for　other　micro-fabrication　system.　©　2008　SPIE.