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The experimental study on electron guns with high current density beam for THz devices is carried out. A thermionic electron gun is designed and the fabrication is underway. The current density requirement at the circuit is >50 A/cm2 for 0.1 THz LIGA fabricated devices [1]. A rectangular sheet electron beam for 0.5THz needs to meet the beam current density requirement of >150 A/cm2 [2].
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