A　new　optimization　structure　for　micro　electromagnetic　relay　is　introduced　based　on　the　research　done　before.　Three-dimensional　structure　and　new　fabrication　process　is　adopted　accordingly　in　the　improved　design.　The　new　structure　can　decrease　the　leak　of　magnetic　circuit　and　increase　the　magnetic　force.　An　optimization　armature　is　introduced　in　order　to　improve　the　electromagnetic　attract　force　and　decrease　the　rigidity　of　the　armature.　A　micro　electromagnetic　relay　is　fabricated　based　on　the　MEMS　technology.　The　size　of　the　micro　electromagnetic　relay　is　about　5mm×5mm×0.4mm.　The　micro　relay　consists　a　lower　magnetic　circuit,　a　planar　exciting　coil　and　a　permalloy　cantilever.　Anisotropie　etching,　electroplating,　polyimide　film　patterning　is　adopted　in　the　fabrication　process.　The　exciting　coil　of　the　micro　electromagnetic　relay　has　16　turns　and　the　resistance　of　the　coil　is　about　20Ω.　The　initial　experiments　show　that　the　permalloy　cantilever　displacement　can　reach　20μm　at　a　current　and　voltage　of　250mA　and　5V.　©　2006　IEEE.