Micro-Electro-Mechanical　System　technology　offers　great　promise　in　addressing　the　need　for　smaller　electromechanical　relays,　and　may　bridge　the　performance　and　economic　gaps　between　conventional　electromechanical　technology　and　solid　state　devices.　It　is　necessary　for　electromagnetic　field　analysis　during　design　process　of　Micro-Electro-Mechanical　relay.　Planar　coil　and　magnetic　plate　structures　were　modeled　by　using　finite　element　method　in　this　paper.　Furthermore　the　open　domain　magnetic　field　views　of　micro-electro-mechanical　relay　with　different　structures　were　compared.　And　the　electromagnetic　attraction　force　of　movable　contacts　in　MEMS　relay　was　analyzed,　thus　can　not　only　simplify　the　fabrication　procedure,　but　also　develop　the　working　performance　of　products.　The　results　of　the　analysis　can　be　useful　for　designers　to　develop　optimal　magnetic　structure　of　micro-electro-mechanical　relays.　©　2005　IEEE.