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In this paper, the structure and fabrication of a type of SiGe HBT with quantum well base region are introduced and analyzed. Basing on this, the high frequency equivalent circuit model of SiGe HBT with modulation doped quantum well base region has been presented. Moreover, the elements of the model are calculated according to the material structure and fabricating size. Then the high frequency characteristics are simulated and explained from the circuit model. The simulation results are in good agreement with that of the test. The cut off frequency fT=16GHz and the maximum oscillation frequency fmax=8GHz for the sample. It is of both higher cut off frequency and the maximum oscillation frequency fmax than the SiGe HBT without quantum well base region with the same size. When the fabricating size of SiGe HBT with quantum well base has been changed, the model still be effective, only the value of the elements of the model should be evaluated again. © 2004 IEEE.
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年份: 2004
卷: 2
页码: 1007-1010
语种: 英文
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