We　report　a　method　for　fabricating　periodic　nanostructures　on　the　surface　of　polydimethylsiloxane　(PDMS)　using　laser　interference　lithography.　The　wave-front　splitting　method　was　used　for　the　system,　as　the　period　and　duty　cycle　can　be　easily　controlled.　Indium　tin　oxide　(ITO)　glass　reveals　favorable　characteristics　for　controlling　the　standing　waves　distributed　in　the　vertical　direction,　and　was　selected　as　the　rigid　substrate　for　the　curing　of　the　PDMS　prepolymer,　photoresist　spin　coating,　and　exposure　processes.　Periodic　nanostructures　such　as　gratings,　dot,　and　hole　arrays　were　prepared.　This　efficient　way　of　fabricating　large　area　periodic　nanoscale　patterns　will　be　useful　for　surface　plasmonic　resonance　and　wearable　electronics.