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作者:

Fan, Xing (Fan, Xing.) | Sun, Jie (Sun, Jie.) | Guo, Weiling (Guo, Weiling.) | Ke, Xiaoxing (Ke, Xiaoxing.) | Yan, Chunli (Yan, Chunli.) | Li, Xuejian (Li, Xuejian.) | Dong, Yibo (Dong, Yibo.) | Xiong, Fangzhu (Xiong, Fangzhu.) | Fu, Yafei (Fu, Yafei.) | Wang, Le (Wang, Le.) | Deng, Jun (Deng, Jun.) | Xu, Chen (Xu, Chen.) (学者:徐晨)

收录:

EI Scopus SCIE

摘要:

Large area graphene is usually grown by chemical vapor deposition on Cu or Ni catalysts at similar to 1000 degrees C. For most materials, high temperature leads to high quality. However, graphene growth at even higher temperatures is rarely reported. Therefore, here we systematically investigate the graphene deposition on refractory metals i.e. metals with extremely high melting points. The growth parameters and material characterizations are given in detail. On Ta which readily forms carbides during the carbon deposition, the growth mode is monolayer due to the chemical absorption of excess carbon in the bulk metal. On Re, there is no carbide formed (except in extreme conditions), which greatly simplifies the scenario. Because of the relatively high carbon solubility in Re, the growth temperature has to be limited in order not to drift into the dominantly multilayer graphene regime caused by the carbon segregation. Graphene with reasonable quality has been achieved, although not as good as expected. For example, on Ta, the residual bonds between the graphene and substrate deteriorate the graphene crystalline quality. Despite the difficulties in refractory metal etching, the transfer technique of the graphene is also explored. This research contributes to the fundamental understanding of the graphene growth theory and technology on refractory metals.

关键词:

Chemical vapor deposition Graphene High temperature growth Refractory metal

作者机构:

  • [ 1 ] [Fan, Xing]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Xuejian]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Fu, Yafei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Wang, Le]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Deng, Jun]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Xu, Chen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Fujian, Peoples R China
  • [ 11 ] [Ke, Xiaoxing]Beijing Univ Technol, Inst Microstruct & Properties Adv Mat, Beijing 100124, Peoples R China
  • [ 12 ] [Yan, Chunli]Lib Fuzhou Univ, Dept Informat & Automat, Fuzhou 350116, Fujian, Peoples R China

通讯作者信息:

  • 孙捷

    [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China;;[Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Fujian, Peoples R China

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来源 :

SYNTHETIC METALS

ISSN: 0379-6779

年份: 2019

卷: 247

页码: 233-239

4 . 4 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:50

JCR分区:1

被引次数:

WoS核心集被引频次: 6

SCOPUS被引频次: 7

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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