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作者:

Zhu, Kaiyi (Zhu, Kaiyi.) | Chen, Hongfang (Chen, Hongfang.) | Zhang, Shulian (Zhang, Shulian.) | Shi, Zhaoyao (Shi, Zhaoyao.) (学者:石照耀) | Wang, Yun (Wang, Yun.) | Tan, Yidong (Tan, Yidong.)

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Scopus SCIE

摘要:

Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.

关键词:

precision measurement frequency-shifted solid-state laser laser feedback

作者机构:

  • [ 1 ] [Zhu, Kaiyi]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 2 ] [Zhang, Shulian]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 3 ] [Tan, Yidong]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 4 ] [Chen, Hongfang]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100022, Peoples R China
  • [ 5 ] [Shi, Zhaoyao]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100022, Peoples R China
  • [ 6 ] [Wang, Yun]Beijing Inst Space Electromech, Beijing 100076, Peoples R China

通讯作者信息:

  • [Tan, Yidong]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

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来源 :

APPLIED SCIENCES-BASEL

ISSN: 2076-3417

年份: 2019

期: 1

卷: 9

2 . 7 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:136

JCR分区:2

被引次数:

WoS核心集被引频次: 22

SCOPUS被引频次: 27

ESI高被引论文在榜: 0 展开所有

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