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Graphene features in its excellent photoelectric properties. Therefore, it can replace the traditional ITO material as a transparent conductive layer of GaN-LED. In order to realize the industrial production of the above applications, the direct preparation technology of graphene on GaN surface by hot-wall CVD was studied and the growth mechanism was explained. The results demonstrate that the optimal conditions for direct growth were growth temperature of 800 ℃, growth time of 60 min, and the intrinsic standoff ratio of CH4 and H2 are 1.59% and 3.17% respectively. Under this condition, multilayer graphene with obvious 2D peak was obtained. The low temperature growth of graphene on GaN surface was studied by cold-wall CVD. The corresponding GaN-LED was produced and its performance was tested. Through producing and testing of GaN-LEDs, it is found that the performance of the device was significantly reduced when the growth temperature was higher than 700 ℃. This research plays certain significant role in realizing the industrial application of graphene in LED. © 2019, Chongqing Functional Materials Periodical Press Co. Ltd. All right reserved.
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