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Abstract:
An electrohydrodynamic (EHD) micropump with planar electrodes on a silcon substrate is fabricated and tested. The micropump consists of a planar electrode array driven by DC voltage. Static pressure tests were performedwithHFE7100 and ethyl alcohol as working fluid. The maximum pressure head achieved by this micropump was 1050Pa for HFE7100.
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Journal of Functional Materials and Devices
ISSN: 1007-4252
Year: 2008
Issue: 2
Volume: 14
Page: 508-511
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 2