Experiment of electrohydrodynaic micropump - 文章详情页

作者：

Sun, C.-X. (Sun, C.-X..) | Yu, H. (Yu, H..) | Li, D.-S. (Li, D.-S..) (学者：李德胜) | Yu, J. (Yu, J..)

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Scopus PKU CSCD

摘要：

An　electrohydrodynamic　(EHD)　micropump　with　planar　electrodes　on　a　silcon　substrate　is　fabricated　and　tested.　The　micropump　consists　of　a　planar　electrode　array　driven　by　DC　voltage.　Static　pressure　tests　were　performedwithHFE7100　and　ethyl　alcohol　as　working　fluid.　The　maximum　pressure　head　achieved　by　this　micropump　was　1050Pa　for　HFE7100.

关键词：

Electrohydrodynamic pump(EHD pump); Ion drag; MEMS

作者机构：

[ 1 ] [Sun, C.-X.]Key Laboratory of Heat Transfer and Energy Conversion, Beijing Education Commission, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Yu, H.]Key Laboratory of Heat Transfer and Energy Conversion, Beijing Education Commission, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Li, D.-S.]The College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Yu, J.]Key Laboratory of Heat Transfer and Energy Conversion, Beijing Education Commission, Beijing University of Technology, Beijing 100022, China

通讯作者信息：

[Yu, J.]Key Laboratory of Heat Transfer and Energy Conversion, Beijing Education Commission, Beijing University of Technology, Beijing 100022, China

电子邮件地址：

jian_yu2001@yahoo.com

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