Design of High-precision Dynamic PZT Driving Power Based on PA85A [基于PA85A的高精度动态压电陶瓷驱动电源设计] - 文章详情页

作者：

Xu, L. (Xu, L..) | Fan, Q. (Fan, Q..) | Liu, X. (Liu, X..) (学者：刘晓) | Zhang, H. (Zhang, H..) | Zhang, Y. (Zhang, Y..) (学者：张勇)

收录：

Scopus PKU CSCD

摘要：

The　piezoelectric　ceramic,as　an　actuator　in　the　atomic　force　microscope　(AFM)　system,can　quickly　trace　the　appearance　of　the　measured　sample.In　order　to　improve　the　positioning　accuracy　and　response　speed　of　PZT　actuators,according　to　the　principle　of　the　voltage-controlled　driving　power,a　high-precision　dynamic　PZT　driving　power　was　designed　based　on　the　high　voltage　operational　amplifier　PA85A.The　factors　that　affect　the　accuracy　and　dynamic　performance　of　system　were　analyzed;　the　method　for　phase　compensation　was　adopted　to　improve　the　stability　of　the　system.The　results　show　that　this　power　has　the　features　of　high-precision,fast　dynamic　response,high　stability,which　can　be　effectively　applied　to　the　AFM　system.　©　2018,　Editorial　Department　of　Journal　of　Piezoelectric　and　Acoustooptic.　All　right　reserved.

关键词：

Driving power; High voltage operational amplifier; High-precision dynamic; Piezoelectric ceramic; Voltage control

作者机构：

[ 1 ] [Xu, L.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 2 ] [Xu, L.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 3 ] [Fan, Q.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 4 ] [Fan, Q.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 5 ] [Liu, X.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 6 ] [Liu, X.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 7 ] [Zhang, H.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 8 ] [Zhang, H.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 9 ] [Zhang, Y.]Institute for Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing, 100024, China

通讯作者信息：

电子邮件地址：

查看成果更多字段

成果类型
所属机构

所有年份指定年份从至