In　this　paper,　the　design　method,　driving　principle　and　characteristics　of　piezoelectric,　electrostatic,　electromagnetic,　pneumatic,　electro　osmosis,　surface　tension,　ferrofluid　luid　and　thermal　bubble　micropumps　were　systematically　summarized.　The　domestic　and　foreign　representatives　of　several　types　of　micro　fluid　driving　pump　systems　were　introduced.　The　structure,　component　size,　and　performance　parameters　were　analyzed　and　compared.　The　development　trend　of　the　micro　pumps　was　summed　up　and　this　paper　provides　a　reference　for　the　design　of　micro　fluid　driving.　©　2018,　Editorial　Department　of　Journal　of　Beijing　University　of　Technology.　All　right　reserved.