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Abstract：
The β-SlC thin films were grown on Si(100) substrates by Cat-CVD. The effect of deposition gas pressures was systematically studied. The Fourier Transform Infrared Spectroscopy(FTIR) spectrum of the samples indicated that crystallized degree of the samples led in appearenee of a minimum. However, the deposition rate was increased with increasing of gas pressures basically. X-ray diffraction(XRD) pattern also testified the formation of /?-SiC in the thin films. Moreover, according to the formula of Debeye-Scherrer, the crystalline size for these thin films was estimated in nanometer-scale.
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Rare Metal Materials and Engineering
ISSN： 1002-185X
Year： 2001
Issue： SUPPL. 1
Volume： 30
Page： 645-
0 . 7 0 0
JCR@2022
ESI Discipline： MATERIALS SCIENCE;
JCR Journal Grade：3
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SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
WanFang Cited Count：
Chinese Cited Count：
30 Days PV： 1
