Investigation of crystalline mechanism of β-SiC thin films by Cat-CVD - 文章详情页

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摘要：

The　β-SlC　thin　films　were　grown　on　Si(100)　substrates　by　Cat-CVD.　The　effect　of　deposition　gas　pressures　was　systematically　studied.　The　Fourier　Transform　Infrared　Spectroscopy(FTIR)　spectrum　of　the　samples　indicated　that　crystallized　degree　of　the　samples　led　in　appearenee　of　a　minimum.　However,　the　deposition　rate　was　increased　with　increasing　of　gas　pressures　basically.　X-ray　diffraction(XRD)　pattern　also　testified　the　formation　of　/?-SiC　in　the　thin　films.　Moreover,　according　to　the　formula　of　Debeye-Scherrer,　the　crystalline　size　for　these　thin　films　was　estimated　in　nanometer-scale.

关键词：

β-sic; Crystalline mechanism cat-cvd; Deposition gas pressures

作者机构：

[ 1 ] [Qian, Z.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 2 ] [Jianchao, L.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 3 ] [Wei, L.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 4 ] [Mei, W.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 5 ] [Hao, W.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 6 ] [Bo, W.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 7 ] [Hui, Y.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 8 ] [Bo, L.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 9 ] [Jingjing, W.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China
[ 10 ] [Zhenyu, Y.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China

通讯作者信息：

[Qian, Z.]Department of Materials Science And. Engineering, Beijing Polytechnic University, Beijing 100022, China

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