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作者:

Wang, Feifei (Wang, Feifei.) | Zhou, Fan (Zhou, Fan.) | Wang, Jinshu (Wang, Jinshu.) (学者:王金淑) | Liu, Wei (Liu, Wei.) | Zhang, Quan (Zhang, Quan.) | Yin, Qiao (Yin, Qiao.)

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EI Scopus SCIE

摘要:

Magnesium oxide (MgO) and MgO/Al2O3 composite thin films were prepared on silver substrates by DC magnetron sputtering technique and their secondary electron yields (delta) and working durability under constant electron bombardment were investigated. X-ray photoelectron spectroscopy and Auger electron spectroscopy analyses reveal that uniform MgO/Al2O3 composite films were developed and residual Al exists in the films after sputtering of the Mg-Al alloy in an Ar-O-2 mixed atmosphere on silver substrates heated at 400A degrees C. The MgO/Al2O3 composite films show superior delta as high as 11.6 and much better resistance to electron bombardment than that of pure MgO films. Good secondary electron emission (SEE) properties of the MgO/Al2O3 film are probably due to the presence of alumina in the film, which has higher bond dissociation energy than MgO, as well as the presence of residual Al in the film, which contributes to effective electron transport in the film and diminished surface charging during SEE. With superior SEE performance, MgO/Al2O3 films have potential for practical electron multipliers in various vacuum electron devices.

关键词:

MgO/Al2O3 composite film MgO resistance to electron bombardment secondary electron emission magnetron sputtering

作者机构:

  • [ 1 ] [Wang, Feifei]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Zhou, Fan]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Wang, Jinshu]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Liu, Wei]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang, Quan]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 6 ] [Yin, Qiao]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China

通讯作者信息:

  • 王金淑

    [Zhou, Fan]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China;;[Wang, Jinshu]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100124, Peoples R China

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来源 :

JOURNAL OF ELECTRONIC MATERIALS

ISSN: 0361-5235

年份: 2018

期: 7

卷: 47

页码: 4116-4123

2 . 1 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:260

JCR分区:3

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 13

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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