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作者:

Fan, T. (Fan, T..) | Liu, F. R. (Liu, F. R..) (学者:刘富荣) | Li, W. Q. (Li, W. Q..) | Guo, J. C. (Guo, J. C..) | Wang, Y. H. (Wang, Y. H..) | Sun, N. X. (Sun, N. X..) | Liu, F. (Liu, F..)

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EI Scopus SCIE

摘要:

Accumulated crystallization characteristics of amorphous Ge2Sb2Te5 (a-GST) films induced by multi-pulsed laser irradiations with different fluences were investigated by x-ray diffraction (XRD), Raman spectroscopy and spectrophotometer. Solid-state transformation was performed at low fluence (LF, 30.5 mJ cm(-2)), whereas melting-cooling transformation dominated at medium and high fluence (MF, 45.7 and HF, 61 mJ cm(-2)). Solid-state transformation induced by subsequent LF pulses promoted the growth and coalescence of grains, linearly increasing the average grain size, accordingly causing blue-shifts of the Raman spectral peaks. For MF/HF pulse irradiated films, the relatively high laser fluence increased the melting depth and reduced the volume fraction of the crystalline state induced by individual pulses, thereby increasing the threshold of laser pulse numbers for XRD detectable crystallization. However, the remelting depth induced by subsequent MF/HF laser pulse progressively decreased. The remelting-recrystallization process refined grain sizes, which improved the red-shifts of Raman spectral peaks. Moreover, optical contrast increased dramatically compared to single laser irradiation and five-level storage could be realized for a linear increase of optical contrast. The present study is fundamental for realizing the potential of multi-level devices.

关键词:

accumulated crystallization Ge2Sb2Te5 laser fluences multi-pulsed laser

作者机构:

  • [ 1 ] [Fan, T.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Liu, F. R.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Li, W. Q.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Guo, J. C.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Wang, Y. H.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 6 ] [Fan, T.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Liu, F. R.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Li, W. Q.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Guo, J. C.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Wang, Y. H.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China
  • [ 11 ] [Sun, N. X.]Northeastern Univ, Elect & Comp Engn Dept, Boston, MA 02115 USA
  • [ 12 ] [Liu, F.]Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian, Shaanxi, Peoples R China

通讯作者信息:

  • 刘富荣

    [Liu, F. R.]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China;;[Liu, F. R.]Beijing Univ Technol, Beijing Engn Res Ctr Appl Laser Technol, Beijing 100124, Peoples R China

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来源 :

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

ISSN: 0268-1242

年份: 2018

期: 7

卷: 33

1 . 9 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:76

被引次数:

WoS核心集被引频次: 8

SCOPUS被引频次: 8

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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