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Servo valve is simplified as linearity in the designing of electro-hydraulic servo system. It is accurated at low flow, but the performance of servo valve is different from flow volume actually. With increasing flow volume, the frequency at 90° phase decreases dramatically, it is about 60 Hz when flow volume is ninety percent of maximum flow. In order to satisfy the control performance of system, this frequency is demanded to be twice the frequency of system need. It is very hard to meet the need at high flow. First-order and second-order compensation algorithms are adapted in this paper, and their application is investigated in shaking table. The analysis results show that performance of servo valve is improved with both first-order and second-order compensation, except that, second-order compensation is better for the demand of shaking table control system.
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