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In this study, based on different anodized aluminium (AAO) templates obtained, the high ordered aligned titania nanoarray thin films have been fabricated via liquid phase deposition(LPD) method. The results show that the crystal structure of the titanium oxide nanoarray thus obtained was anatase after heat-treating at 400°C for 4 h.The volume fraction of Al 2O B on the template prepared in oxalic acid template more than 0.71, the ordered aligned titania nanorods are synthesized, characterized with the outer diameter of 100 nm. The volume fraction of Al 2O 3 on the template prepared in phosphoric acid template less than 0.71, the ordered aligned titania nanotubes are synthesized, characterized with the outer diameter of 200 nm and the inner diameter of 100 nm.
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