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摘要:
According to the principle and the existing process techniques of ELID (electrolytic-inprocess-dressing) grinding, using the current lapping machine as the experimental platform, an ELID lapping process system was developed. ELID ultra precision lapping was applied to machine alumina ceramic seal, which obtained good effect. The roughness of processed samples reached about 15 nm, the efficiency increased by 60% , the cost reduced by 50%. On this basis, an ELID lapping prototype was designed, which laid a solid theoretical and practical basis for the production of ELID lapping machine in the future.
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