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Abstract:
The optical and electrical properties of unintentionally doped GaN films grown at 100 Torr and 500 Torr pressure respectively by MOCVD system were investigated. It is proved that low growth pressure of 100 Torr can effectively reduce the Carbon impurities in the GaN films to suppress the formation of deep acceptors which are the origin of yellow and blue light peaks in the photoluminescence measurement, and the GaN films fabricated under such conditions present better optical properties. Meantime, GaN films grown at different pressure show different electrical properties. The GaN films grown at 500 Torr usually have higher carrier concentration ((4.6~6.4)×10 16 cm -3) and higher carrier mobility (446~561 cm 2/(V·s)), while the GaN films grown at 100 Torr usually have lower carrier concentration (1.56~3.99×10 16 cm -3) and lower carrier mobility(22.9~202 cm 2/(V·s)).
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Semiconductor Optoelectronics
ISSN: 1001-5868
Year: 2012
Issue: 3
Volume: 33
Page: 367-369,374
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 1
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