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作者:

Dong, Yibo (Dong, Yibo.) | Xie, Yiyang (Xie, Yiyang.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Li, Xuejian (Li, Xuejian.) | Deng, Jun (Deng, Jun.) | Fan, Xing (Fan, Xing.) | Pan, Guanzhong (Pan, Guanzhong.) | Wang, Qiuhua (Wang, Qiuhua.) | Xiong, Fangzhu (Xiong, Fangzhu.) | Fu, Yafei (Fu, Yafei.) | Sun, Jie (Sun, Jie.)

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EI Scopus SCIE

摘要:

A method of producing large area continuous graphene directly on SiO2 by chemical vapor deposition is systematically developed. Cu thin film catalysts are sputtered onto the SiO2 and pre-patterned. During graphene deposition, high temperature induces evaporation and balling of the Cu, and the graphene "lands onto" SiO2. Due to the high heating and growth rate, continuous graphene is largely completed before the Cu evaporation and balling. 60 nm is identified as the optimal thickness of the Cu for a successful graphene growth and mu m-large feature size in the graphene. An all-carbon device is demonstrated based on this technique. (c) 2018 Author(s).

关键词:

作者机构:

  • [ 1 ] [Dong, Yibo]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Xie, Yiyang]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Xu, Chen]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Li, Xuejian]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Deng, Jun]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Fan, Xing]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Pan, Guanzhong]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Wang, Qiuhua]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Xiong, Fangzhu]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Fu, Yafei]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 11 ] [Sun, Jie]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 12 ] [Sun, Jie]Chalmers Tekniska Hogskola AB, Mikroteknol Nanovetenskap, S-41296 Gothenburg, Sweden

通讯作者信息:

  • 徐晨

    [Xu, Chen]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

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来源 :

APL MATERIALS

ISSN: 2166-532X

年份: 2018

期: 2

卷: 6

6 . 1 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:260

JCR分区:1

被引次数:

WoS核心集被引频次: 13

SCOPUS被引频次: 15

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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