Nano　texturing　has　been　confirmed　as　an　effective　structure　to　improve　the　efficiency　of　multi-crystalline　silicon　solar　cells　by　reducing　optical　loss.　In　this　study,　nano　textured　solar　cells　are　fabricated　by　the　Reactive　Ion　Etching　(RIE)　method　based　on　a　conventional　production　line.　Several　characterization　methods　are　employed　to　evaluate　the　morphology,　minority　carrier　lifetime,　quantum　efficiency　and　electricity　performance　of　both　nano　textured　and　micro　textured　solar　cells.　The　results　show　that　nano　textured　solar　cells　have　a　maxiumum　efficiency　of　19.21　%　and　an　average　efficiency　that　is　0.57　%　higher　than　that　of　micro　textured　solar　cells.　Thus,　the　ME　method　is　an　effective　way　to　manufacture　nano　textured　solar　cells.　It　can　demonstrably　improve　the　photoelectric　conversion　efficiency　of　mass-produced　solar　cells　and　reduce　the　production　cost,　which　is　significant　to　the　development　of　solar　cell　industry.