We　report　industrial　fabrication　of　different　kinds　of　nanostructured　multicrystalline　silicon　solar　cells　via　normal　acid　texturing,　reactive　ion　etching　(RIE),　and　metal-assisted　chemical　etching　(MACE)　processes　on　diamond　wire　sawing　wafer.　The　effect　of　different　surface　structure　on　reflectivity,　lifetime,　and　electrical　performance　was　systematically　studied　in　this　paper.　The　difference　between　industrial　acid,　RIE,　and　MACE　textured　multicrystalline　silicon　solar　cells　to　our　knowledge　has　not　been　investigated　previously.　The　resulting　efficiency　indicates　that　low　reflectivity　surface　structure　with　the　size　of　0.2-0.8　mu　m　via　RIE　and　MACE　process　do　not　always　lead　to　low　lifetime　compared　with　acid　texturing　process.　Both　RIE　and　MACE　process　is　promising　candidate　for　high　efficiency　processes　for　future　industrial　diamond　wire　sawing　multicrystalline　silicon　solar　cells.