Analysis for load limitation of square shaped boron-doped silicon diaphragm - 文章详情页

作者：

Xu, C. (Xu, C..) (学者：徐晨) | Shi, M.-Y. (Shi, M.-Y..) | Zhao, L.-L. (Zhao, L.-L..) | Li, B. (Li, B..) | Shen, G.-D. (Shen, G.-D..)

收录：

Scopus PKU CSCD

摘要：

Considering　the　residual　stress,　the　total　stress　analytical　solutions　for　square-shaped　boron-doped　silicon　diaphragms　with　large　deflection　are　presented.　With　this　total　stress　analytical　solution　and　Griffith　fracture　criterion,　the　maximum　displacement　and　load　limitation　Pmax　of　the　square-shaped　boron-doped　silicon　diaphragms　are　calculated,　and　the　results　agree　well　with　the　reported　experiment　results.　Load　limitation　Pmax　is　not　only　related　with　the　shape　and　the　dimension　of　diaphragms,　but　also　dependent　on　material　characteristics,　especially　the　fabrication　process.

关键词：

Fracture stress; Griffith fracture criterion; Load limitation; MEMS; Residual stress; Square-shaped diaphragm

作者机构：

[ 1 ] [Xu, C.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Shi, M.-Y.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Zhao, L.-L.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Li, B.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Shen, G.-D.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China

通讯作者信息：

徐晨
[Xu, C.]Beijing Optoelectronic Technology Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China

电子邮件地址：

xuchen58@bjut.edu.cn

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