A　new　microelectromagnetic　relay　is　presented　and　fabricated　based　on　micromachining　technology,　aiming　at　the　miniaturization　and　high　manufacturing　efficiency　of　electromagnetic　relays.　This　microrelay　is　composed　of　a　lower　magnetic　circuit,　a　planar　exciting　coil,　and　an　upper　magnetic　armature.　A　complete　magnetic　circuit　is　composed,　and　the　＂ON＂　and　＂OFF＂　states　are　controlled　by　the　current　of　the　exciting　coil.　The　dimension　of　this　microrelay　is　5　mm　×　5　mm　×　0.4-mm.　The　fabrication　process　mainly　includes　lithography,　sputtering,　electroplating,　etching,　sacrifice-layer　technology,　etc.　Electromagnetic　force　is　calculated　theoretically.　The　calculation　results　are　used　for　the　optimization　design　of　the　armature　and　the　number　of　turns　of　the　exciting　coil.　A　microelectromagnetic　relay　is　fabricated　and　the　initial　test　results　are　given.　The　resistance　of　the　exciting　coil　is　about　300　Ω.　The　switch-on　state　resistance　is　about　1.7　Ω　at　an　exciting　current　of　about　50-mA.　©　Higher　Education　Press　and　Springer-Verlag　2006.