This　paper　proposes　a　three-dimensional　scanning　probe　calibration　method　to　reduce　the　positioning　accuracy　requirements.　A　fast　least　squares　iterative　algorithm　and　an　iterative　data　filtering　algorithm　are　designed　to　achieve　the　highly　precise　and　efficient　calibration　of　the　three-dimensional　scanning　probe.　Several　calibration　simulation　experiments　are　designed　to　verify　its　stability　and　accuracy,　and　the　influences　on　calibration　result　from　various　errors　are　tested.　Experimental　results　show　that　this　three-dimensional　scanning　probe　calibration　method　does　not　require　the　positioning　accuracy　of　measuring　machine,　it　is　insensitive　to　the　measuring　machine　error　and　scanning　probe　detection　error,　the　accuracy　of　unit　vector　of　coordinate　system　of　three-dimentional　scanning　probe　reaches　0.00001,　and　the　three-dimensional　scanning　probe　calibration　requirements　are　completely　satisfied.