Preparing　a　highly　textured,　flawless　YBa2Cu3O7　(YBCO)　layer　by　ion-beam-assisted　deposition　(IBAD)　requires　a　substrate　with　a　smooth　surface.　In　this　paper,　smooth　tapes　of　Hastelloy　C-276,　a　common　template　alloy,　were　prepared　by　electrochemical　polishing,　and　the　surface　roughness　the　tapes　was　investigating　by　atomic　force　microscopy　and　scanning　electron　microscopy.　By　analyzing　these　results,　it　was　discussed　how　the　processing　parameters　affect　the　surface　roughness,　and　it　is　found　the　following　optimized　processing　parameters:　current　density　of　0.104　A.cm(-2),　temperature　of　50　degrees　C,　plate　spacing　of　9　cm　and　time　of　150　s.　With　these　optimized　parameters,　the　substrate　roughness　decreases　to　less　than　5　nm,　meeting　the　requirements　of　IBAD.