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摘要:
To safely and reliably use aluminum nitride (AlN) helices in the fabrication of novel micro/nanodevices, it is very important to know their mechanical properties. Herein, we investigate the mechanical properties of individual AlN helices using an in situ tensile-bending test. Tensile tests reveal that an AlN helix has an average epsilon of similar to 4.7 +/- 0.8% elastic deformation before a typical brittle fracture occurs. The bending test shows a two-step mechanical feature-linear-elastic followed by an elastic-plastic process-with an average epsilon(bent) of similar to 54.5 +/- 0.6%. Our results provide direct cognition about the mechanical properties of AlN helices and their benefit to the design of AlN-based flexible micro/nanodevices.
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来源 :
NANOTECHNOLOGY
ISSN: 0957-4484
年份: 2017
期: 27
卷: 28
3 . 5 0 0
JCR@2022
ESI学科: MATERIALS SCIENCE;
ESI高被引阀值:287
中科院分区:3
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