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作者:

Sun, Jie (Sun, Jie.) | Li, Xuejian (Li, Xuejian.) | Guo, Weiling (Guo, Weiling.) | Zhao, Miao (Zhao, Miao.) | Fan, Xing (Fan, Xing.) | Dong, Yibo (Dong, Yibo.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Deng, Jun (Deng, Jun.) | Fu, Yifeng (Fu, Yifeng.)

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Scopus SCIE

摘要:

Molybdenum disulfide (MoS2) is one of the most important two-dimensional materials after graphene. Monolayer MoS2 has a direct bandgap (1.9 eV) and is potentially suitable for post-silicon electronics. Among all atomically thin semiconductors, MoS2's synthesis techniques are more developed. Here, we review the recent developments in the synthesis of hexagonal MoS2, where they are categorized into top-down and bottom-up approaches. Micromechanical exfoliation is convenient for beginners and basic research. Liquid phase exfoliation and solutions for chemical processes are cheap and suitable for large-scale production; yielding materials mostly in powders with different shapes, sizes and layer numbers. MoS2 films on a substrate targeting high-end nanoelectronic applications can be produced by chemical vapor deposition, compatible with the semiconductor industry. Usually, metal catalysts are unnecessary. Unlike graphene, the transfer of atomic layers is omitted. We especially emphasize the recent advances in metalorganic chemical vapor deposition and atomic layer deposition, where gaseous precursors are used. These processes grow MoS2 with the smallest building-blocks, naturally promising higher quality and controllability. Most likely, this will be an important direction in the field. Nevertheless, today none of those methods reproducibly produces MoS2 with competitive quality. There is a long way to go for MoS2 in real-life electronic device applications.

关键词:

micromechanical exfoliation chemical vapor deposition two-dimensional materials transition metal dichalcogenide Molybdenum disulfide

作者机构:

  • [ 1 ] [Sun, Jie]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Li, Xuejian]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Fan, Xing]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Xu, Chen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Deng, Jun]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Sun, Jie]Chalmers, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden
  • [ 9 ] [Zhao, Miao]Chinese Acad Sci, Inst Microelect, High Frequency High Voltage Device & Integrated C, Beijing 10029, Peoples R China
  • [ 10 ] [Fu, Yifeng]Chalmers, Dept Microtechnol & Nanosci, Elect Mat & Syst Lab, S-41296 Gothenburg, Sweden

通讯作者信息:

  • 孙捷

    [Sun, Jie]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China;;[Sun, Jie]Chalmers, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden;;[Fu, Yifeng]Chalmers, Dept Microtechnol & Nanosci, Elect Mat & Syst Lab, S-41296 Gothenburg, Sweden

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来源 :

CRYSTALS

ISSN: 2073-4352

年份: 2017

期: 7

卷: 7

2 . 7 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:287

中科院分区:4

被引次数:

WoS核心集被引频次: 155

SCOPUS被引频次: 155

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

近30日浏览量: 2

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