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Author:

Yu, Baoning (Yu, Baoning.) | Zhao, Kangkang (Zhao, Kangkang.) | Yang, Taotao (Yang, Taotao.) | Jiang, Yong (Jiang, Yong.) | Fan, Xiaoqiang (Fan, Xiaoqiang.) | Lu, Min (Lu, Min.) | Han, Jun (Han, Jun.)

Indexed by:

EI Scopus SCIE

Abstract:

Using the technique of Microfabrication, such as deep silicon dry etching, lithography, etc. Si-PIN neutron detectors with porous microstructure have been successfully fabricated. In order to lower the leakage current, the key fabrication processes, including the Al windows opening, deep silicon etching and the porous side wall smoothing, have been optimized. The cross-section morphology and current-voltage characteristics have been measured to evaluate the microfabrication processes. With the optimized conditions presented by the measurements, a neutron detector with a leakage current density of 2.67Acm(-2) at a bias of -20V is obtained. A preliminary neutron irradiation test with Cf-252 neutron source has also been carried out. The neutron irradiation test shows that the neutron detection efficiency of the microstructured neutron detectors is almost 3.6 times higher than that of the planar ones.

Keyword:

microstructured leakage current neutron detector deep silicon etching

Author Community:

  • [ 1 ] [Yu, Baoning]Beijing Univ Technol, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 2 ] [Zhao, Kangkang]Beijing Univ Technol, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 3 ] [Yang, Taotao]Beijing Univ Technol, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 4 ] [Han, Jun]Beijing Univ Technol, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 5 ] [Yu, Baoning]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398, Suzhou 215123, Peoples R China
  • [ 6 ] [Zhao, Kangkang]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398, Suzhou 215123, Peoples R China
  • [ 7 ] [Yang, Taotao]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398, Suzhou 215123, Peoples R China
  • [ 8 ] [Lu, Min]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398, Suzhou 215123, Peoples R China
  • [ 9 ] [Jiang, Yong]CAEP, Inst Nucl Phys & Chem, Mianshan Rd 64, Mianyang 621900, Peoples R China
  • [ 10 ] [Fan, Xiaoqiang]CAEP, Inst Nucl Phys & Chem, Mianshan Rd 64, Mianyang 621900, Peoples R China

Reprint Author's Address:

  • [Lu, Min]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Ruoshui Rd 398, Suzhou 215123, Peoples R China

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Source :

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

ISSN: 1862-6300

Year: 2017

Issue: 6

Volume: 214

2 . 0 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:158

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 5

SCOPUS Cited Count: 6

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Affiliated Colleges:

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