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The forward conduction characteristics of lateral AlGaN/GaN heterojunction Schottky barrier diode (SBD) were reseached. Different structures of AlGaN/GaN SBD based on sapphire substrate and silicon substrate were fabricated. It was experimentally shown that forward conduction characteristics of the device could be effectively improved by appropriately changing the Schottky-ohmic electrode layout, or applying a small bias voltage on the conductive substrate appropriately. The fabricated AlGaN/GaN SBD devices based on Al2O3 substrate, with Schottky electrode radius of 120 μm and Schottky-ohmic electrode spacing of 25 μm, and being achieved the forward current of 0.05 A@2 V(Ron=9.13 mΩ·cm2), and the reverse saturation leakage current of 10-6 A. In the test of the fabricated AlGaN/GaN SBD devices based on silicon substrate, it was found that the forward conduction characteristics could be improved by applying the substrate bias. ©, 2015, Editorial Office of «Res. Prog. SSE». All right reserved.
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