A comparison model of V- and Z-shaped electrothermal microactuators - 文章详情页

作者：

Zhang, Z. (Zhang, Z..) | Yu, Y. (Yu, Y..) | Liu, X. (Liu, X..) (学者：刘晓) | Zhang, X. (Zhang, X..)

收录：

Scopus

摘要：

This　paper　presents　a　novel　analytical　model　that　provides　a　unique　guidance　on　the　design　comparison　and　estimation　of　V-　and　Z-shaped　electrothermal　microactuators.　A　common　analytical　model　for　both　V-　and　Z-shaped　actuators　is　developed　for　the　first　time　in　this　work　using　the　proposed　topological　structure　layout.　The　developed　model　is　verified　with　finite-element　(FE)　simulation　results　using　commercialized　software　ANSYS　and　with　reported　experimental　results.　Finally　by　virtue　of　the　benchmark　and　the　system　model,　systematic　performance　comparison　with　varying　parameters　of　V-　and　Z-shaped　actuators　are　conducted　to　provide　the　essential　insights　into　the　design　analysis　and　selection　of　V-　and　Z-　shaped　eletrothermal　microactuators.　©　2015　IEEE.

关键词：

analytical model; Electrothermal actuator; parameter analysis; performance comparison

作者机构：

[ 1 ] [Zhang, Z.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
[ 2 ] [Yu, Y.]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
[ 3 ] [Liu, X.]Department of Mechanical Engineering, McGill University, Montreal, Canada
[ 4 ] [Zhang, X.]Department of Engineering and Aarhus, School of Engineering, Aarhus University, Aarhus, Denmark

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