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作者:

Pan, Qingtao (Pan, Qingtao.) | Wang, Tao (Wang, Tao.) | Yan, Hui (Yan, Hui.) | Zhang, Ming (Zhang, Ming.) | Mai, Yaohua (Mai, Yaohua.)

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Scopus SCIE

摘要:

Crystallization of glass/Aluminum (50, 100, 200 nm) /hydrogenated amorphous silicon (a-Si:H) (50, 100, 200 nm) samples by Aluminum-induced crystallization (AIC) is investigated in this article. After annealing and wet etching, we found that the continuity of the polycrystalline silicon (poly-Si) thin films was strongly dependent on the double layer thicknesses. Increasing the a-Si:H/Al layer thickness ratio would improve the film microcosmic continuity. However, too thick Si layer might cause convex or peeling off during annealing. Scanning electron microscopy (SEM) and Energy Dispersive X-ray spectroscopy (EDX) are introduced to analyze the process of the peeling off. When the thickness ratio of a-Si:H/Al layer is around 1 to 1.5 and a-Si:H layer is less than 200 nm, the poly-Si film has a good continuity. Hall measurements are introduced to determine the electrical properties. Raman spectroscopy and X-ray diffraction (XRD) results show that the poly-Si film is completely crystallized and has a preferential (111) orientation.

关键词:

Filmcontinuity Aluminum-induced crystallization Polycrystalline silicon thin film

作者机构:

  • [ 1 ] [Pan, Qingtao]Shahe Inst Glass Technol Res, Shahe 054101, Peoples R China
  • [ 2 ] [Wang, Tao]Beijing Univ Technol, Coll Mat Sci & Engn, Lab Thin Film Mat, Beijing 100124, Peoples R China
  • [ 3 ] [Yan, Hui]Beijing Univ Technol, Coll Mat Sci & Engn, Lab Thin Film Mat, Beijing 100124, Peoples R China
  • [ 4 ] [Zhang, Ming]Beijing Univ Technol, Coll Mat Sci & Engn, Lab Thin Film Mat, Beijing 100124, Peoples R China
  • [ 5 ] [Mai, Yaohua]Baoding Tianwei Solar films Co Ltd, Baoding 071051, Peoples R China

通讯作者信息:

  • [Pan, Qingtao]Shahe Inst Glass Technol Res, Shahe 054101, Peoples R China

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来源 :

BRAZILIAN JOURNAL OF PHYSICS

ISSN: 0103-9733

年份: 2017

期: 2

卷: 47

页码: 145-150

1 . 6 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:158

中科院分区:4

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