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We realize for the first time the local lifetime control by means of gettering platinum through the induced defects created by proton implantation in high-voltage power diodes. The region of the damage resulting from the proton irradiation was decorated by the substitutional platinum diffused from PtSi anode at 700°C/60 minutes annealing. Finally, the ratio of the platinum concentration of maximum damage region to the damage tail region is 1.5-2. With the comparison of the traditional platinum-diffusion lifetime control, this new technique demonstrates the good potential to fabricate power P-i-N diodes with the faster reverse recovery speed, the larger softness recovery factor and the lower leakage current.
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