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作者:

Jia, Y. (Jia, Y..) | Wang, J. (Wang, J..) | Kang, B. (Kang, B..) | Zhang, B. (Zhang, B..)

收录:

Scopus PKU CSCD

摘要:

We realize for the first time the local lifetime control by means of gettering platinum through the induced defects created by proton implantation in high-voltage power diodes. The region of the damage resulting from the proton irradiation was decorated by the substitutional platinum diffused from PtSi anode at 700°C/60 minutes annealing. Finally, the ratio of the platinum concentration of maximum damage region to the damage tail region is 1.5-2. With the comparison of the traditional platinum-diffusion lifetime control, this new technique demonstrates the good potential to fabricate power P-i-N diodes with the faster reverse recovery speed, the larger softness recovery factor and the lower leakage current.

关键词:

Local lifetime control; Platinum gettering; Power diode; Proton implantation

作者机构:

  • [ 1 ] [Jia, Y.]Power Devices Lab., Dept. of Electron. Info., Beijing Polytech. Univ., Beijing 100022, China
  • [ 2 ] [Wang, J.]Power Devices Lab., Dept. of Electron. Info., Beijing Polytech. Univ., Beijing 100022, China
  • [ 3 ] [Kang, B.]Power Devices Lab., Dept. of Electron. Info., Beijing Polytech. Univ., Beijing 100022, China
  • [ 4 ] [Zhang, B.]Power Electron. Factory, Tsinghua Univ., Beijing 102201, China

通讯作者信息:

  • [Jia, Y.]Power Devices Lab., Dept. of Electron. Info., Beijing Polytech. Univ., Beijing 100022, China

电子邮件地址:

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来源 :

Research and Progress of Solid State Electronics

ISSN: 1000-3819

年份: 2004

期: 4

卷: 24

页码: 422-426

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